产品概述/Product Introduction：

本设备是将SiC籽晶通过有机胶粘接在石墨上。提高籽晶粘接质量是保证高 品质SiC晶体生长的首要前提。

The equipment is to bond SiC seed crystals to graphite by means of an organic adhesive.Improving the  bonding quality of seed crystals is the primary prerequisite to ensure the growth of high quality Sic  crystals.

提供6/8英寸验证工艺

Provide6/8 inches  process

产品特点/Product Characteristics：

• 晶圆尺寸:6-8英寸 Nafer size: 6-8 inches

• 温度范围:温度200-800℃，温度均匀性±3℃ Temperature 200-800 C, temperature uniformity±3 ℃

• 压力:最大20KN，力均匀性＜±1% Pressure Maximum 20,000 N,Force Uniformity<±1%

• 真空度:≤10Pa Vacuum pressure:≤10Pa

• 压头:柔性压头/硬性压头 Indenter: Flexible indenter/rigid indenter